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Murarka, A., Paydavosi, S., Andrew, T. L., Wang, A. I., Lang, J. H. & Bulović, V. Printed MEMS membranes on silicon. Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on 309-312 (2012). doi:10.1109/MEMSYS.2012.6170156