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Niroui, F., Saravanapavanantham, M., Swager, T. M., Lang, J. H. & Bulović, V. Fabrication of nanoscale structures with nanometer resolution and surface uniformity. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) (2017). doi:10.1109/MEMSYS.2017.7863494