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Filters: Year is 2017 and Author is Lang, Jeffrey H.  [Clear All Filters]
2017
Niroui, F., Saravanapavanantham, M., Swager, T. M., Lang, J. H. & Bulović, V. Fabrication of nanoscale structures with nanometer resolution and surface uniformity. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) (2017). doi:10.1109/MEMSYS.2017.7863494