Contact-printed microelectromechanical systems

Publication Type:

Journal Article

Source:

Adv. Mater., Wiley Online Library, Volume 22, Issue 16, p.1840-1844 (2010)

ISBN:

0935-9648

Keywords:

2010, 2013 and earlier

Abstract:

A process for rapid fabrication of metallic MEMS (microelectromechanical systems) without lithographic processing is presented. Using dimensionally
scalable contact printing, 3D electromechanical structures (see figure)
are fabricated and functionally tested. Flexible, paper-thin device arrays
produced by this method may enable such applications as pressure sensing
skins for people and vehicles, phased array detectors for acoustic
imaging, and novel adaptive-texture display applications.