A Flexible Underwater Pressure Sensor Array Using a Conductive Elastomer Strain Gauge

Publication Type:

Journal Article


J. Microelectromech. Syst., ieeexplore.ieee.org, Volume 21, Issue 4, p.897-907 (2012)




2012, 2013 and earlier, Arrays, C, carbon, Carbon black, Cavity resonators, conducting polymers, conductive carbon-black-PDMS composite, conductive elastomer, conductive elastomer strain gauge, creep, diaphragms, distance 0.5 m, distance 15 mm, dynamic response, elastomers, Electrical resistance measurement, filled polymers, flexible, flexible underwater pressure sensor array, fractional resistance change, high sensitivity, modeling, moving object, polydimethylsiloxane (PDMS), pressure measurement, pressure sensor array, pressure sensors, pressure transducers, pressure waveform peak amplitude, Resistance, resistive strain gauge, Sensor arrays, Silicon, Strain, strain gauges, strain-concentrating polydimethylsiloxane diaphragm, surface wave, underwater, underwater equipment, underwater pressure variation transducer


This paper presents a flexible pressure sensor array which is demonstrated to transduce underwater pressure variations produced by moving objects and
surface waves. The sensors exhibit a 0.0014 fractional resistance change
per 100 Pa, achieving a high 1.5-Pa pressure resolution. The measurement
has a repeatability of 22% of the peak amplitude of the pressure waveform,
due to creep. Additionally, sensor operation while bent to a 0.5-m radius
of curvature is demonstrated. Each sensor consists of a
strain-concentrating polydimethylsiloxane (PDMS) diaphragm and a resistive
strain gauge made of a conductive carbon-black-PDMS composite. A 1-D array
of four sensors with a 15-mm center-to-center spacing is fabricated, and
the dynamic response of the sensors is characterized and modeled.